With the demands of new practice function about thin films in the market,sputtering technology have a great development in scientific research and industrial manufacture field , To investigate the preparation of thin metal films by Sputtering method and its properties. The preparation of thin metal films on glass bases by DC dipole sputtering,and test the thin metal films of thickness,electrical properties, and uniformity,repeatability. The relationship between the thickness of sputtered films and working time were analyzed using weighing method; The morphology of metal films was studied using scanning electron microscopy and Optical microscope ,analysed the thin metal films'properties, step coverage, smoothness, adhesiveness.
The results show that on the same conditions, thickness of sputtered films and Sputtering time present the linear relationship ,Thickness of sputtered films increase simply with the increasing of Sputtering time.Sputtered films have features that Center high around to decline and better Step coverage.
Keywords:Sputtering Preparation of thin films Metal film Properties