平面螺旋线圈匝数对微型ICP激发源的启燃入射功率的影响

电气自动化论文编号:ZD316  论文字数:9773,页数:22

目    录

 一、引言…………………………………………………………….1
 1.1  研究目的及意义……………………………………………………1
 1.2  微型ICP的研究现状………………………………………………1
 1.3  论文主要内容………………………………………………………4
 二、ICP激发源………………………………………………………...5
 2.1  ICP激发源………………………………………………………….5
 2.2  微型ICP激发源的原理及等效电路………………………………6
 2.3  微型ICP激发源的结构……………………………………………7
 2.3.1  射频功率驱动电路模块………………………………………….7
 2.3.2  激发放电室组件………………………………………………….8
 三、平面螺旋线圈……………………………………………………..9
 3.1  立体结构螺旋线圈………………………...……………………….9
 3.2  平面结构螺旋线圈…………………………..………….………….9
 3.3  平面螺旋线圈电感量的计算……………………..…….………….10
 3.4  平面螺旋线圈的加工………………………………..……….…….11
 四、仪器设备及实验…………………………………………………..12
 4.1  实验仪器设备………………………………………………………12
 4.2  实验方法……………………………………………………………12
 4.3  实验数据及结论……………………………………………………13
 4.3.1  外径10mm的平面螺旋线圈匝数与射频功率的关系………….14
 4.3.2  外径15mm的平面螺旋线圈匝数与射频功率的关系………….15
 4.4  实验结果分析………………………………………………………15
 五、结论………. ……………………………………………………….16
 谢辞 …………………………………………………………………….17
 参考文献………………………………………………………………..18

摘    要

 在物质成分分析中光谱分析仪器是重要的检测手段之一，而激发光源是光谱仪器的重要组成部件之一。电感耦合等离子体（Inductively Coupled Plasma，ICP）激发源因诸多优点而在光谱仪中得到广泛应用。本文简要叙述了ICP激发源的装置和原理，介绍了国内外微型ICP激发源的研究现状，围绕微型ICP激发源微电路组件中的关键元件——平面螺旋线圈做了测试研究。采用13.56MHz的射频功率电源，实验测试了平面螺旋线圈外径分别为10mm和15mm时，匝数（选取3、4.、5匝）与启燃/维持射频功率之间的关系，给出了实验测试数据。实验测试结果表明：对于外径为10mm的平面螺旋线圈，3匝时启燃功率具有最小值（9.5W），5匝时所需的维持功率具有最小值（0.8W）；对于外径为15mm的平面螺旋线圈，3匝时启燃功率和维持功率都具有最小值，分别为6.8W和0.8W。

关键词：光谱仪  微型ICP激发源  平面螺旋线圈   启燃入射功率  匝数

The Turn of Planar Spiral-shaped Coil Influence on The Ignition Forward Power about Micro ICP
ABSTRACT

 In detecting the chemical composition of materials, the Optical Spectrometer is one of the most important methods. Excitation source is an important functional component of the Optical Emission Spectrometer (OES). With the inductively coupled plasma (ICP) has a great many merits, it is always applied to OES. In this paper maked a summary of mICP source of its devices and principles. The research and application status of mICP in this time at home and abroad is described briefly. The parameter optimization of microcircuit module is the number of the turn of the planar spiral-shaped coil. When the radio frequency supply power is 13.56MHz, the external diameter is 10 mm and 15 mm, perform the experiment with the relationship between the number of the turn(3,4,5 is selected) and igniting/maintaining power of the mICP source. And the data of the experiment is obtained. The result of this experiment indicate that :For the external diameter is 10 mm, when the number of the turn is 3, the igniting power reach the minimum value(9.5W); when the number of the turn is 5, the maintaining power reach the minimum value(0.8W). For the external diameter is 10 mm, when the number of the turn is 3 the igniting power and the maintaining power both reach the minimum value, separately is 6.8 W and 0.8W.
 
 Key words: spectrometer  mICP source  planar spiral-shaped coil  ignition forward power turn